Lisovskiy, V.Yegorenkov, V.2010-11-172010-11-172004-01Vacuum 74 (2004) 19–28https://ekhnuir.karazin.ua/handle/123456789/1712We report the recorded current–voltage characteristics of a RF capacitive discharge in oxygen. Low-frequency oscillations of the plasma potential in a kilohertz frequency range are observed to accompany the transition of the discharge from a weak- (a-) to a strong-current (g-) regime in the low-pressure range. The weak-current regime of the RF capacitive discharge is observed within the pressure range limited not only from the medium pressure side but also from the lower-pressure one. Electron temperature and plasma density are registered with a probe technique.enplasma physicsgas dischargesArticle