Low-pressure gas breakdown in dual-frequency RF electric  fields in nitrogen

dc.contributor.author	Lisovskiy, V.
dc.contributor.author	Booth, Jean-Paul
dc.contributor.author	Landry, K.
dc.contributor.author	Douai, D.
dc.contributor.author	Cassagne, V.
dc.contributor.author	Yegorenkov, V.
dc.date.accessioned	2010-11-17T19:49:18Z
dc.date.available	2010-11-17T19:49:18Z
dc.date.issued	2007-10
dc.description.abstract	This paper reports the recorded breakdown curves for dual-frequency (27.12MHz/2MHz and 13.56MHz/50Hz) discharges in nitrogen. Applying the LF voltage shifts the RF breakdown curve to the region of higher voltages and gas pressures, which is associated with the increased loss of charged particles due to the drift in the LF field. At higher LF voltage amplitudes the LF field contributes to gas ionization, the breakdown voltage for the RF discharge decreases and approaches zero when a self-sustained discharge in the LF field ignites. Applying the RF voltage leads to the decrease in the breakdown LF voltage, possibly due to the decrease of electron losses because of the oscillations in the RF field.	en
dc.description.sponsorship	-	en
dc.identifier.citation	Europhysics Letters, 80 (2007) 25001	en
dc.identifier.uri	https://ekhnuir.karazin.ua/handle/123456789/1701
dc.language.iso	en	en
dc.publisher	Europhysics Letters www.epl journal.org	en
dc.relation.ispartofseries	;doi: 10.1209/0295-5075/80/25001
dc.subject	plasma physics	en
dc.subject	gas discharges	en
dc.title	Low-pressure gas breakdown in dual-frequency RF electric fields in nitrogen	en
dc.type	Article	en

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