Electron-drift velocity determination in CF4 and SF6 in a strong electric field from breakdown curves of low-pressure RF discharge

Abstract

In this paper we report the values of the electron-drift velocity in CF4 and SF6 within the range E/p = 200–1000 V cm−1 Torr−1. We have used the recorded coordinates of the turning point on the breakdown curves of the rf capacitive discharge. We have also formulated the main requirements to the experimental device for correct recording of the breakdown curves of the low-pressure rf capacitive discharge. Our data are in good agreement with those of other authors who have used different approaches. We have also obtained the results on the electron-drift-velocity values within the E=p region where no other techniques are applicable. Our findings are also supported by numerical simulation data obtained with the application of a conventional Bolsig code.