Electron-drift velocity determination in CF4 and SF6 in a strong electric field from breakdown curves of low-pressure RF discharge
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Дата
1999-10
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Видавець
JOURNAL OF PHYSICS D: APPLIED PHYSICS
Анотація
In this paper we report the values of the electron-drift velocity in CF4 and SF6
within the range E/p = 200–1000 V cm−1 Torr−1. We have used the recorded coordinates of
the turning point on the breakdown curves of the rf capacitive discharge. We have also
formulated the main requirements to the experimental device for correct recording of the breakdown curves of the low-pressure rf capacitive discharge. Our data are in good
agreement with those of other authors who have used different approaches. We have also
obtained the results on the electron-drift-velocity values within the E=p region where no other techniques are applicable. Our findings are also supported by numerical simulation data obtained with the application of a conventional Bolsig code.
Опис
Ключові слова
plasma physics, gas discharges
Бібліографічний опис
J. Phys. D: Appl. Phys. 32 (1999) 2645–2648.