Alpha–gamma transition in RF capacitive discharge in  low-pressure oxygen

dc.contributor.author	Lisovskiy, V.
dc.contributor.author	Yegorenkov, V.
dc.date.accessioned	2010-11-17T21:07:18Z
dc.date.available	2010-11-17T21:07:18Z
dc.date.issued	2004-01
dc.description.abstract	We report the recorded current–voltage characteristics of a RF capacitive discharge in oxygen. Low-frequency oscillations of the plasma potential in a kilohertz frequency range are observed to accompany the transition of the discharge from a weak- (a-) to a strong-current (g-) regime in the low-pressure range. The weak-current regime of the RF capacitive discharge is observed within the pressure range limited not only from the medium pressure side but also from the lower-pressure one. Electron temperature and plasma density are registered with a probe technique.	en
dc.description.sponsorship	-	en
dc.identifier.citation	Vacuum 74 (2004) 19–28	en
dc.identifier.uri	https://ekhnuir.karazin.ua/handle/123456789/1712
dc.language.iso	en	en
dc.publisher	www.elsevier.com/locate/vacuum	en
dc.relation.ispartofseries	;doi:10.1016/j.vacuum.2003.11.003
dc.subject	plasma physics	en
dc.subject	gas discharges	en
dc.title	Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen	en
dc.type	Article	en

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