Double layer onset inside the near-electrode sheath  of a RF capacitive discharge in oxygen

dc.contributor.author	Lisovskiy, V.
dc.contributor.author	Yegorenkov, V.
dc.date.accessioned	2010-11-17T20:48:01Z
dc.date.available	2010-11-17T20:48:01Z
dc.date.issued	2006-04
dc.description.abstract	This paper reports the axial profiles of the electron temperature Te in the RF capacitive discharge in oxygen recorded with a probe technique. We observed the Te peaks near the boundaries of the sheaths as well as inside the near-electrode sheath. The Te peak inside the sheath is, probably, due to the formation of the double layer at the anode phase of this near-electrode sheath. The assumption of a double layer formation is also supported by the photos of the sheath glow making evident the bright region inside the sheath. The results of our measurements agree with our fluid simulation satisfactorily.	en
dc.description.sponsorship	-	en
dc.identifier.citation	Vacuum 80 (2006) 458–467	en
dc.identifier.uri	https://ekhnuir.karazin.ua/handle/123456789/1708
dc.language.iso	en	en
dc.publisher	www.elsevier.com/locate/vacuum	en
dc.relation.ispartofseries	;doi:10.1016/j.vacuum.2005.07.038
dc.subject	plasma physics	en
dc.subject	gas discharges	en
dc.title	Double layer onset inside the near-electrode sheath of a RF capacitive discharge in oxygen	en
dc.type	Article	en

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