Low-pressure gas breakdown in combined fields

Abstract

This paper reviews measured and theoretical data relating to the low-pressure discharge breakdown in DC and uniform RF fields and their combination. The original results on determination of molecular constants of various gases from breakdown curves obtained by the authors are given. We have investigated the effect of the DC electric field on the RF breakdown pattern. In particular the influence of the DC electric field on the ambiguity region of the RF discharge breakdown curves has been determined. Breakdown equations in combined fields have been derived and comparison has been made between these equations and measured data. Simple analytical criteria for gas breakdown for a wide range of parameters have been given.